In this paper we present, in a framework of 1D-membrane Micro-Electro-Mechanical- Systems (MEMS) theory, a formalization of the problem of existence and uniqueness of a solution related to the membrane deformation u for electrostatic actuation in the steady-state case. In particular, we propose a new model in which the electric eld magnitude E is proportional to the curvature of the membrane and, for it, we obtain results of existence by Schauder-Tychonoff's fixed point application and subsequently we establish conditions of uniqueness. Finally, some numerical tests have been carried out to further support the analytical results.

Electrostatic Field in Terms of Geometric Curvature in Membrane MEMS Devices

VERSACI, Mario;FATTORUSSO, Luisa Angela Maria
2017-01-01

Abstract

In this paper we present, in a framework of 1D-membrane Micro-Electro-Mechanical- Systems (MEMS) theory, a formalization of the problem of existence and uniqueness of a solution related to the membrane deformation u for electrostatic actuation in the steady-state case. In particular, we propose a new model in which the electric eld magnitude E is proportional to the curvature of the membrane and, for it, we obtain results of existence by Schauder-Tychonoff's fixed point application and subsequently we establish conditions of uniqueness. Finally, some numerical tests have been carried out to further support the analytical results.
2017
MEMS; Electrostatic Attuation; BOUNDARY SEMI-LINEAR; Green Function; Fixed-Point Theorems
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/20.500.12318/2715
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