In this paper the physical mechanisms of electron scattering in solids are studied, emphasis being placed on the processes relevant in electron spectroscopy and lithography. The essential features of the Monte Carlo approach to electron penetration are reviewed. Lithography applications are briefly discussed.

Perspectives in electron scattering by microstructures

MESSINA G;S. SANTANGELO;
1993-01-01

Abstract

In this paper the physical mechanisms of electron scattering in solids are studied, emphasis being placed on the processes relevant in electron spectroscopy and lithography. The essential features of the Monte Carlo approach to electron penetration are reviewed. Lithography applications are briefly discussed.
1993
ELECTRON SCATTERING, ELECTRON BEAM LITHOGRAPHY, MONTE CARLO SIMULATION, MASK FABRICATION
File in questo prodotto:
File Dimensione Formato  
Messina_1993_IlNuovoCimentoD_Perspectives-editor.pdf

non disponibili

Descrizione: Articolo principale
Tipologia: Versione Editoriale (PDF)
Licenza: Tutti i diritti riservati (All rights reserved)
Dimensione 561.34 kB
Formato Adobe PDF
561.34 kB Adobe PDF   Visualizza/Apri   Richiedi una copia

I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.

Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/20.500.12318/2911
Citazioni
  • ???jsp.display-item.citation.pmc??? ND
  • Scopus 0
  • ???jsp.display-item.citation.isi??? 0
social impact