An analysis of electron scattering is presented, into short and long range components, and a comparison is made with the conventional decomposition into forward and back scattering. A generalized ν is defined in place of the usual backscattering coefficient. Results are shown, in terms of Monte Carlo simulation, relative to some cases of practical interest. In particular, a quite general system is discussed for master-mask fabrication. The limits of the conventional approach are demonstrated.
The generalized backscattering coefficient: a novel parameter in electron scattering processes
MESSINA G;S. SANTANGELO;
1992-01-01
Abstract
An analysis of electron scattering is presented, into short and long range components, and a comparison is made with the conventional decomposition into forward and back scattering. A generalized ν is defined in place of the usual backscattering coefficient. Results are shown, in terms of Monte Carlo simulation, relative to some cases of practical interest. In particular, a quite general system is discussed for master-mask fabrication. The limits of the conventional approach are demonstrated.File in questo prodotto:
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