A new type of non-perturbing electromagnetic power sensor for microwaves and millimeter-waves, based on the thermo- optical effect in a silicon interferometric etalon cavity is presented. The incident field power is partially dissipated into the all-silicon metal-less etalon, constituting the sensing element of the detector, so causing its temperature increase. This, in turn, induces the intensity modulation of a probe laser beam reflected by the cavity after a multiple beam interference process. The sensing element is directly connected to an optical fiber for remote interrogation, so avoiding the use of perturbing coaxial cables. The performances of such a new class of non-perturbing and wideband probes, in terms of sensitivity and resolution are discussed in detail. The experimental results concerning the characterization of a preliminary prototype sensor are presented and compared with theoretical data. The dependence of the sensor response on the electromagnetic frequency and on the sensing element characteristics is finally discussed.

Photonic all-silicon microsensor for electromagnetic power in the microwave and millimeter-wave range

DELLA CORTE, Francesco Giuseppe
2000

Abstract

A new type of non-perturbing electromagnetic power sensor for microwaves and millimeter-waves, based on the thermo- optical effect in a silicon interferometric etalon cavity is presented. The incident field power is partially dissipated into the all-silicon metal-less etalon, constituting the sensing element of the detector, so causing its temperature increase. This, in turn, induces the intensity modulation of a probe laser beam reflected by the cavity after a multiple beam interference process. The sensing element is directly connected to an optical fiber for remote interrogation, so avoiding the use of perturbing coaxial cables. The performances of such a new class of non-perturbing and wideband probes, in terms of sensitivity and resolution are discussed in detail. The experimental results concerning the characterization of a preliminary prototype sensor are presented and compared with theoretical data. The dependence of the sensor response on the electromagnetic frequency and on the sensing element characteristics is finally discussed.
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Utilizza questo identificativo per citare o creare un link a questo documento: http://hdl.handle.net/20.500.12318/18070
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