Photonic all-silicon microsensor for electromagnetic power in the microwave and millimeter-wave range

A new type of non-perturbing electromagnetic power sensor for microwaves and millimeter-waves, based on the thermo- optical effect in a silicon interferometric etalon cavity is presented. The incident field power is partially dissipated into the all-silicon metal-less etalon, constituting the sensing element of the detector, so causing its temperature increase. This, in turn, induces the intensity modulation of a probe laser beam reflected by the cavity after a multiple beam interference process. The sensing element is directly connected to an optical fiber for remote interrogation, so avoiding the use of perturbing coaxial cables. The performances of such a new class of non-perturbing and wideband probes, in terms of sensitivity and resolution are discussed in detail. The experimental results concerning the characterization of a preliminary prototype sensor are presented and compared with theoretical data. The dependence of the sensor response on the electromagnetic frequency and on the sensing element characteristics is finally discussed.