Standard microelectronic technologies have been used to fabricate silicon-based new sensing and communication devices, exploiting the strong thermo-optic effect present in this material. A temperature sensor, an electromagnetic energy sensor and an optical modulator are in particular presented. These devices all work on optical interferometric principles and are therefore suitable for application in hostile environments.
Silicon microsensors and optical switches based on the thermo-optic effect
DELLA CORTE, Francesco Giuseppe
1998-01-01
Abstract
Standard microelectronic technologies have been used to fabricate silicon-based new sensing and communication devices, exploiting the strong thermo-optic effect present in this material. A temperature sensor, an electromagnetic energy sensor and an optical modulator are in particular presented. These devices all work on optical interferometric principles and are therefore suitable for application in hostile environments.File in questo prodotto:
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