In this paper the physical mechanisms of electron scattering in solids are studied, emphasis being placed on the processes relevant in electron spectroscopy and lithography. The essential features of the Monte Carlo approach to electron penetration are reviewed. Lithography applications are briefly discussed.
Perspectives in electron scattering by microstructures / Messina, G; Paoletti, A.; Santangelo, S.; Tucciarone, A.. - In: IL NUOVO CIMENTO DELLA SOCIETÀ ITALIANA DI FISICA. B, GENERAL PHYSICS, RELATIVITY, ASTRONOMY AND MATHEMATICAL PHYSICS AND METHODS. - ISSN 1594-9982. - D15:2-3(1993), pp. 531-539. [10.1007/BF02456936]
Perspectives in electron scattering by microstructures
MESSINA G;S. SANTANGELO;
1993-01-01
Abstract
In this paper the physical mechanisms of electron scattering in solids are studied, emphasis being placed on the processes relevant in electron spectroscopy and lithography. The essential features of the Monte Carlo approach to electron penetration are reviewed. Lithography applications are briefly discussed.| File | Dimensione | Formato | |
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