In this paper, we report on the characterization of homoepitaxial CVD diamond grown onto HPHT Ib diamond substrates by varying systematically the methane to hydrogen ratio in the deposition gas mixture (1-7%) and the microwave power (520-720 W). Growth rates up to approximately 2.2 μm/h have been achieved. X-ray diffraction, Raman spectroscopy and photoluminescence (PL) have been used to characterize the diamond samples. Raman measurements point out an excellent crystalline quality and phase purity of the homoepitaxial specimens even at the highest CH4 concentration used. Completely flat PL spectra registered in a wide energy range (1.7-2.7 eV) exclude impurity contamination of the diamond samples. Such results show that homoepitaxial CVD diamond can be grown, at moderate microwave power and with moderate growth rate, preserving a good crystalline quality.

Characterization of homoepitaxial CVD diamond grown at moderate microwave power

FAGGIO G;G. MESSINA
;
S. SANTANGELO;
2006

Abstract

In this paper, we report on the characterization of homoepitaxial CVD diamond grown onto HPHT Ib diamond substrates by varying systematically the methane to hydrogen ratio in the deposition gas mixture (1-7%) and the microwave power (520-720 W). Growth rates up to approximately 2.2 μm/h have been achieved. X-ray diffraction, Raman spectroscopy and photoluminescence (PL) have been used to characterize the diamond samples. Raman measurements point out an excellent crystalline quality and phase purity of the homoepitaxial specimens even at the highest CH4 concentration used. Completely flat PL spectra registered in a wide energy range (1.7-2.7 eV) exclude impurity contamination of the diamond samples. Such results show that homoepitaxial CVD diamond can be grown, at moderate microwave power and with moderate growth rate, preserving a good crystalline quality.
DEFECT CHARACTERIZATION, DIAMOND FILM, HOMOEPITAXY, PLASMA CVD
File in questo prodotto:
File Dimensione Formato  
Donato_2006_DiamondRelMater_Characterization-editor.pdf

non disponibili

Descrizione: Articolo principale
Tipologia: Versione Editoriale (PDF)
Licenza: Tutti i diritti riservati (All rights reserved)
Dimensione 141.19 kB
Formato Adobe PDF
141.19 kB Adobe PDF   Visualizza/Apri   Richiedi una copia

I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.

Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/20.500.12318/5666
Citazioni
  • ???jsp.display-item.citation.pmc??? ND
  • Scopus 3
  • ???jsp.display-item.citation.isi??? 3
social impact