Electrostatic Actuation

In a framework of 1\$D\$ membrane MEMS theory, we consider the MEMS boundary semi-linear elliptic problem with fringing field egin{equation}otag u''=-rac{lambda^2(1+delta |u'|^2)}{(1-u)^2};;; ext{in};;Omega, ;;u=0;; ext{on};;partial Omega, end{equation} oindent where \$lambda^2\$ and \$delta\$ are positive parameters, \$Omega=[-L,L] subset mathbb{R}\$, and \$u\$ is the deflection of the membrane. In this model, since the electric field \$ mathbf{E} \$ on the membrane is locally orthogonal to the straight line tangent to the membrane at the same point, \$ | mathbf{E} | \$, proportional to \$lambda^2/(1-u)^2\$, is considered locally proportional to the curvature of the membrane. Thus, we achieve interesting results of existence writing it into its equivalent integral formulation by means of a suitable Green function and applying on it the Schauder-Tychonoff fixed point theory. Therefore, the uniqueness of the solution is proved exploiting both Poincar'e inequality and Gronwall Lemma. Then, once the instability of the only obtained equilibrium position is verified, an interesting limitation for the potential energy dependent on the fringing field capacitance is obtained and studied.

### Curvature-dependent electrostatic field as a principle for modelling membrane MEMS device with fringing field

#### Abstract

In a framework of 1\$D\$ membrane MEMS theory, we consider the MEMS boundary semi-linear elliptic problem with fringing field egin{equation}otag u''=-rac{lambda^2(1+delta |u'|^2)}{(1-u)^2};;; ext{in};;Omega, ;;u=0;; ext{on};;partial Omega, end{equation} oindent where \$lambda^2\$ and \$delta\$ are positive parameters, \$Omega=[-L,L] subset mathbb{R}\$, and \$u\$ is the deflection of the membrane. In this model, since the electric field \$ mathbf{E} \$ on the membrane is locally orthogonal to the straight line tangent to the membrane at the same point, \$ | mathbf{E} | \$, proportional to \$lambda^2/(1-u)^2\$, is considered locally proportional to the curvature of the membrane. Thus, we achieve interesting results of existence writing it into its equivalent integral formulation by means of a suitable Green function and applying on it the Schauder-Tychonoff fixed point theory. Therefore, the uniqueness of the solution is proved exploiting both Poincar'e inequality and Gronwall Lemma. Then, once the instability of the only obtained equilibrium position is verified, an interesting limitation for the potential energy dependent on the fringing field capacitance is obtained and studied.
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2021
Electrostatic Actuation
Boundary Semi-Linear Elliptic Models
MEMS
Fringing Field
Schauder Tychonoff Fixed Point Theore
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Utilizza questo identificativo per citare o creare un link a questo documento: `https://hdl.handle.net/20.500.12318/94316`
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