In this paper, a stable numerical approach for recovering the membrane profile of a 2D Micro-Electric-Mechanical-Systems (MEMS) is presented. Starting from a well-known 2D nonlinear second-order differential model for electrostatic circular membrane MEMS, where the amplitude of the electrostatic field is considered proportional to the mean curvature of the membrane, a collocation procedure, based on the three-stage Lobatto formula, is derived. The convergence is studied, thus obtaining the parameters operative ranges determining the areas of applicability of the device under analysis.
Recovering of the Membrane Profile of an Electrostatic Circular MEMS by a Three-Stage Lobatto Procedure: A Convergence Analysis in the Absence of Ghost Solutions / Versaci, M., Angiulli, G., Jannelli, A.. - In: MATHEMATICS. - ISSN 2227-7390. - 8:487(2020), pp. 1-19. [10.3390/math8040487]
Recovering of the Membrane Profile of an Electrostatic Circular MEMS by a Three-Stage Lobatto Procedure: A Convergence Analysis in the Absence of Ghost Solutions
Mario Versaci
;Giovanni Angiulli;
2020-01-01
Abstract
In this paper, a stable numerical approach for recovering the membrane profile of a 2D Micro-Electric-Mechanical-Systems (MEMS) is presented. Starting from a well-known 2D nonlinear second-order differential model for electrostatic circular membrane MEMS, where the amplitude of the electrostatic field is considered proportional to the mean curvature of the membrane, a collocation procedure, based on the three-stage Lobatto formula, is derived. The convergence is studied, thus obtaining the parameters operative ranges determining the areas of applicability of the device under analysis.| File | Dimensione | Formato | |
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